Accelerating advances in IT systems demand increased integration in semiconductor chips. Achieving this requires nanometer-level design accuracy, extremely high-purity materials, and a high degree of formation control. At Tosoh, we utilize our accumulated technologies in metallurgy, metal organics, organic compound molecular design, and organic synthesis to supply materials to support the development of advanced IT systems.

Sputtering targets represent the fruits of our labors in the field of metallurgy. They involve the highpurity chrome, aluminum, and other metals essential to the production of semiconductors, magnetic recording media, and recording head and thin-film resistors.  The thin films used in the semiconductors of the future will depend on chemical vapor deposition (CVD) technology. Based on its expertise in molecular design and thin film formation technologies, Tosoh is hard at work developing CVD materials, such as ruthenium and iridium complexes, with superior performance features.

Quartz parts, such as reaction chambers and boats, and substrates produced by Tosoh play an important role in the manufacture of semiconductors. To increase yields, quartzware must exhibit high levels of purity and superior heat resistance, durability, and ease of processing. Our researchers are improving on our refining, formation, fabrication, powder molding, and plasma spraying technologies for quartz to steadily develop a line of quartzware products that is in a class by itself globally.

A revolution is under way in flat-panel displays, which play a central role in our information society.  Our molecular design and organic synthesis technologies are key contributors to the development of materials for the organic electroluminescent (EL) displays rapidly gaining popularity in the display market. The technology to synthesize high-efficiency electron hole transport materials, long an industry stumbling block, is among the results of our efforts with these technologies.  These are just a few of the ways Tosoh contributes to communications.